发明名称 RADIATION-SENSITIVE COMPOSITION
摘要 A radiation-sensitive composition includes a polymer composition and a radiation-sensitive acid generator. The polymer composition includes a first polymer and a second polymer. The first polymer includes a repeating unit shown by a following formula (1). The second polymer includes a repeating unit shown by a following formula (2) and does not include a repeating unit shown by the formula (1).
申请公布号 US2012282550(A1) 申请公布日期 2012.11.08
申请号 US201213527731 申请日期 2012.06.20
申请人 JSR CORPORTION 发明人 YADA YUJI;KIMURA TOORU;UTAKA TOMOHIRO
分类号 G03F7/004 主分类号 G03F7/004
代理机构 代理人
主权项
地址