| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exhaust silencing structure for a rotor contactless type vacuum pump that can achieve miniaturization and cost reduction as a pump device while avoiding upsizing of an exhaust muffler. <P>SOLUTION: The exhaust silencing structure is provided for a vacuum pump of a configuration having two exhaust ports 29, 29 in one pump chamber provided by one cylinder 10, and a rotor rotationally moving in a contactless state in the pump chamber. The two exhaust ports 29, 29 are provided for exhaust of the substantially equivalent capacity. The two exhaust ports 29, 29 are connected respectively and separately with exhaust mufflers 50, 60 of the substantially equivalent capacity. <P>COPYRIGHT: (C)2013,JPO&INPIT |
