| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a production method for a laminate having patterned metal films, capable of readily plasma etching a plating layer and of obtaining a laminate having excellent insulating properties between the patterned metal films. <P>SOLUTION: The production method for the laminate having patterned metal films includes: a plating layer-forming step in which a plating layer is formed on top of a substrate, using a plating layer-forming composition including a polymer having a prescribed unit; a catalyst application step in which a plating catalyst or a precursor thereof is applied to the plating layer; a plating step in which plating is performed and a metal film is formed on top of the plating layer; a pattern-forming step in which an etching fluid is used to form the patterned metal film; an acidic solution contacting step in which the substrate having the patterned metal film and an acidic solution are brought in contact with each other; and a plating layer-removal step in which the plating layer in an area in which no patterned metal film is formed, is removed by plasma etching. <P>COPYRIGHT: (C)2013,JPO&INPIT |
