发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE FILM, PATTERN FORMING METHOD, FORMING METHOD FOR HOLLOW STRUCTURE, AND ELECTRONIC COMPONENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition that has excellent heat and moisture resistance, has a high elasticity in a cured product at high temperature, and also has excellent hollow-structure maintainability, and a photosensitive film, a pattern forming method, a forming method for hollow structure, and an electronic component using the same. <P>SOLUTION: A photosensitive resin composition comprises (A) a photopolymerizable compound having at least one ethylenically unsaturated group and (B) a photopolymerizable initiator, and contains an oxime ester compound and/or an acylphosphine oxide compound as (B) the photopolymerizable initiator. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012215872(A) 申请公布日期 2012.11.08
申请号 JP20120074808 申请日期 2012.03.28
申请人 HITACHI CHEM CO LTD 发明人 KATO SADAAKI;FUJII SHINJIRO
分类号 G03F7/031;C08F2/50;C08F20/36;C08F290/06;G03F7/004;G03F7/027;G03F7/029;H03H9/25 主分类号 G03F7/031
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