摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid ejecting head, which can suppress deterioration in performance of a liquid ejecting head, and also can suppress deterioration in productivity. <P>SOLUTION: The method for manufacturing a liquid ejecting head including a flow path forming member with a flow path leading to a nozzle opening from which liquid is ejected, includes the steps of: radiating a first surface constituting a part of the flow path forming member and including an oxide film of a plate-like first member with at least either of ions and neutral atoms in a vacuum; radiating a second surface constituting a part of the flow path forming member and including an oxide film of a plate-like second member with at least either of ions and neutral atoms in a vacuum; and pressing the second member on the first member while bringing the first and second surfaces into contact with each other in a vacuum, to joint the first and second members together. <P>COPYRIGHT: (C)2013,JPO&INPIT |