摘要 |
<P>PROBLEM TO BE SOLVED: To provide a centrifugal separator allowing effective temperature control because no heat is generated in a cooling container by an eddy current even if the cooling container is installed close to a rotor and the rotor embedded with a magnet is rotated. <P>SOLUTION: This centrifugal separator includes: the rotor 3 rotationally driven by a motor 2 inside a vacuum vessel 1; the cooling container 5 interposed between the vacuum vessel 1 and the rotor 3; and a cooler 6 for cooling the cooling container 5. At least a part of the cooling container 5 is made of a non-electroconductive material 5B. Thus, the part of the cooling container 5 is made of the non-electroconductive material 5B, so that eddy current loss is prevented, and the high-accuracy temperature control of the rotor can be performed. <P>COPYRIGHT: (C)2013,JPO&INPIT |