发明名称 MANUFACTURING METHOD OF HERMETIC CONTAINER
摘要 <P>PROBLEM TO BE SOLVED: To enhance long term reliability of airtightness in a hermetic container. <P>SOLUTION: A plurality of bonding materials 1a, 1b, 1c the viscosity of which has a negative temperature coefficient are arranged at intervals between a first substrate and a second substrate so as to come into contact with both the first and second substrates. Subsequently, the bonding materials 1a, 1b, 1c are irradiated with local heating light 41 therealong and the first and second substrates are bonded. The bonding materials 1a, 1b, 1c are fused by irradiation of the local heating light 41, and the adjoining bonding materials 1a, 1b, 1c are connected. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012216458(A) 申请公布日期 2012.11.08
申请号 JP20110081857 申请日期 2011.04.01
申请人 CANON INC 发明人 MATSUMOTO SHINJI
分类号 H01J9/26;H01L51/50;H05B33/04;H05B33/10 主分类号 H01J9/26
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