METHOD FOR MANUFACTURING HIGH QUALITY GRAPHENE USING CONTINUOUS HEAT TREATMENT CHEMICAL VAPOR DEPOSITION METHOD

摘要

Provided is a method for manufacturing graphene for increasing the size of a crystal grain of the graphene. In the method for manufacturing graphene of the present invention, a substrate having a catalyst layer made up of a transition metal formed thereon, is charged inside a chamber, and a vapor carbon supply source is provided inside the chamber. The catalyst layer is locally heated, and a continuous heat treatment for moving the heated area is carried out, so that a carbon component is dissolved in the catalyst layer, after which the graphene is extracted from the dissolved carbon component to the surface of the catalyst layer.