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发明名称	.
摘要
申请公布号	KR101198876(B1)	申请公布日期	2012.11.07
申请号	KR20100008310	申请日期	2010.01.29
申请人		发明人
分类号	C30B15/14;C30B15/30;C30B29/06;H01L21/02	主分类号	C30B15/14
代理机构		代理人
主权项
地址

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