UNIT FOR SUPPORTING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE USING THE SAME

摘要

PURPOSE: A support unit for a substrate and a substrate processing device using the same are provided to improve productivity by supporting substrates of various sizes with one support unit. CONSTITUTION: A support unit(200) is installed on the upper side of a table. The support unit supports a substrate(50). A processing unit(120) processes the substrate. The substrate is mounted on a stage in the long direction. A first support unit is installed on one long side of the stage. The first support unit supports one long side of the substrate. A second support unit is installed on one short side of the stage. The second support unit supports one short side of the substrate. A third support unit supports other long side of the substrate. A fourth support unit supports other shot side of the substrate. [Reference numerals] (AA) Out; (BB) In