| 摘要 |
PURPOSE: A fabric transferring device and an electrostatic chuck thereof are provided to automatically inject and discharge fabrics by adsorbing and transferring the fabrics with an electrostatic chuck. CONSTITUTION: A fabric transferring device comprises an electrostatic chuck(26) and a transferring device. The electrostatic chuck comprises a first electrode and a second electrode. Electrostatic force is generated as window and cell units to adsorb fabrics on the bottom of the electrostatic chuck. When voltage is applied to the first and second electrodes, the electrostatic force is generated as the window and cell units so that the fabrics can be adsorbed on the bottom of the electrostatic chuck. The transferring device lifts upward and downward the electrostatic chuck at a cargo box in which the fabrics are loaded. The transferring device reciprocates the electrostatic chuck between the cargo box and a position to be discharged the fabrics in order to transfer the electrostatic chuck adsorbing the fabrics to the position to be discharged the fabrics.
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