DECOUPLED COMPLEMENTARY MASK PATTERNING TRANSFER METHOD,申请号EP20050740110-传众专利搜索

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发明名称	DECOUPLED COMPLEMENTARY MASK PATTERNING TRANSFER METHOD
摘要
申请公布号	EP1749312(B1)	申请公布日期	2012.11.07
申请号	EP20050740110	申请日期	2005.04.18
申请人	FREESCALE SEMICONDUCTOR, INC.	发明人	STEPHENS, TAB A.;FU, CHONG-CHENG;KING, CHARLES F.
分类号	H01L21/302;H01L21/28;H01L21/3205;H01L21/3213;H01L21/331;H01L21/461;H01L21/4763;H01L21/8222;H01L21/8242	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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