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发明名称
METHOD AND DEVICE FOR THE WET CHEMICAL TREATMENT OF MATERIAL FEEDSTOCK
摘要
申请公布号
EP2520140(A1)
申请公布日期
2012.11.07
申请号
EP20100800710
申请日期
2010.12.28
申请人
ATOTECH DEUTSCHLAND GMBH
发明人
SKUPIN, ANDREAS;BRUCKNER, HELMUT;LOWINSKI, CHRISTIAN
分类号
H05K3/00;C23C18/16;H05K3/18
主分类号
H05K3/00
代理机构
代理人
主权项
地址
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