ACTIVE MATRIX SUBSTRATE AND METHOD FOR MANUFACTURING SAME

摘要

An active matrix substrate includes a plurality of scanning lines (11a) extending parallel to each other; a plurality of signal lines (16a) extending parallel to each other in a direction crossing the scanning lines (11a); a plurality of TFTs (5) each provided at each of intersections of the scanning lines (11 a) and the signal lines (16a), and each including a semiconductor layer (4a) and a source electrode (16aa) and a drain electrode (16b) which are formed on the semiconductor layer (4a) in a layer in which the signal lines (16a) are formed; and a coating type insulating layer formed between each of the scanning lines (11a) and each of the signal lines (16a). A plurality of openings (15a) are formed in the insulating layer such that each of the semiconductor layers (4a) is exposed, and at least part of a peripheral end of the opening (15a) of the insulating layer is positioned on an inner side relative to each of peripheral ends of the semiconductor layers (4a).