发明名称
摘要 <p>In accordance with one aspect, the present invention provides a method for providing polycrystalline films having a controlled microstructure as well as a crystallographic texture. The methods provide elongated grains or single-crystal islands of a specified crystallographic orientation. In particular, a method of processing a film on a substrate includes generating a textured film having crystal grains oriented predominantly in one preferred crystallographic orientation; and then generating a microstructure using sequential lateral solidification crystallization that provides a location-controlled growth of the grains orientated in the preferred crystallographic orientation.</p>
申请公布号 JP5068171(B2) 申请公布日期 2012.11.07
申请号 JP20070543001 申请日期 2004.11.18
申请人 发明人
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
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