| 摘要 |
PURPOSE: A MoCr target material and a manufacturing method thereof are provided to produce a low-oxygen MoCr target which hardly induces particles or splash. CONSTITUTION: A method for manufacturing a MoCr target material comprises the steps of: pulverizing a sintered Mo body to an average particle diameter of 20-500Mm to make Mo powder, heat-treating the Mo powder in a reductive atmosphere, preparing Cr powder having an average particle diameter of 20-500Mm, mixing the reduced Mo powder with the Cr powder, and pressing and sintering the mixed powder to obtain a sintered MoCr body.
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