| 摘要 |
PURPOSE: A substrate processing system and a tray used for the same are provided to smoothly mount a substrate by correcting the deformation of the tray according to the difference of an expansion coefficient between members comprising the tray. CONSTITUTION: An outer frame includes a pair of main frames(610) and a pair of connection frames(620). The connection frames connects the end of the main frames. A plate member is installed on the outer frame. The plate member forms a loaded side. A plurality of substrates(10) is loaded on the loaded side. One or more clamping units(650) cover some edge part of the plate member. The clamping units combine the plate member with the outer frame. One or more clamping array unit(700) arranges the plate member by applying external force. |
