| 摘要 |
<p>The device (30) has a pump flange (6) for connecting the device with a high vacuum pump (2) i.e. turbomolecular pump. A lead structure (50) is arranged such that molecules e.g. metallic vapor or non-metal such as selenium and sulfur, from an inner space (12) of a chamber (10) are directly passed through another pump flange (32) and conduct thrusts with the device in a path between the flanges. The lead structure is connected with cooling devices, and an inner body (52) is connected with the cooling devices. The lead structure and the inner body are separated by a maintenance flange (36). The cooling devices include a coolant inlet (40), coolant pipe (42) and a coolant outlet (44). An independent claim is also included for an arrangement comprising a device.</p> |
