发明名称 Semiconductor structure and manufacturing method of the same
摘要 A semiconductor structure and a manufacturing method of the same are provided. The semiconductor structure includes a substrate, a first stacked structure, a second stacked structure, a dielectric element, and a conductive line. The first stacked structure and the second stacked structure are disposed on the substrate. Each of the first stacked structure and the second stacked structure includes conductive strips and insulating strips stacked alternately. The conductive strips are separated from each other by the insulating strips. The dielectric element is disposed on the first stacked structure and the second stacked structure and includes a second dielectric portion. The first stacked structure and the second stacked structure are separated from each other by only the second dielectric portion. The conductive line is disposed on the stack sidewalls of the first stacked structure and the second stacked structure far from the second dielectric portion.
申请公布号 US8304911(B2) 申请公布日期 2012.11.06
申请号 US201113024546 申请日期 2011.02.10
申请人 CHEN SHIH-HUNG;LUE HANG-TING;HSIAO YI-HSUAN;MACRONIX INTERNATIONAL CO., LTD. 发明人 CHEN SHIH-HUNG;LUE HANG-TING;HSIAO YI-HSUAN
分类号 H01L23/48 主分类号 H01L23/48
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