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经营范围
发明名称
Deposition apparatus
摘要
申请公布号
KR101198041(B1)
申请公布日期
2012.11.06
申请号
KR20100094990
申请日期
2010.09.30
申请人
发明人
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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