发明名称 |
Pattern generating method, method of manufacturing semiconductor device, computer program product, and pattern-shape-determination-parameter generating method |
摘要 |
A pattern generating method includes: extracting, from a shape of a pattern generated on a substrate, a contour of the pattern shape; setting evaluation points as verification points for the pattern shape on the contour; calculating curvatures on the contour in the evaluation points; and verifying the pattern shape based on whether the curvatures satisfy a predetermined threshold set in advance. |
申请公布号 |
US8307310(B2) |
申请公布日期 |
2012.11.06 |
申请号 |
US20100683993 |
申请日期 |
2010.01.07 |
申请人 |
KOTANI TOSHIYA;MASHITA HIROMITSU;TAGUCHI TAKAFUMI;OGAWA RYUJI;KABUSHIKI KAISHA TOSHIBA |
发明人 |
KOTANI TOSHIYA;MASHITA HIROMITSU;TAGUCHI TAKAFUMI;OGAWA RYUJI |
分类号 |
G06F17/50;G01B11/24;G01N21/88;G01N21/956;G03F1/84;G06F7/60;G06F17/10;G06F19/00;G06K9/00;H01L21/027 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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