| 摘要 |
<p>PURPOSE: A chamber with a transferring apparatus is provided to improve availability by arranging a door and a vacuum pump, etc. at the outside of a chamber. CONSTITUTION: A chamber(100) includes an inlet port(111) and an outlet port(113). A plurality of rotators are arranged to be separated along the direction of the outlet port. A driving apparatus is arranged inside the chamber. The driving apparatus provides rotatory power to any one of the plurality of rotators. A conveying shaft is rotated by the driving apparatus.</p> |
