发明名称 Edge seal for a semiconductor device and method therefor
摘要 In one embodiment, an edge seal region of a semiconductor die is formed by forming a first dielectric layer on a surface of a semiconductor substrate near an edge of the semiconductor die and extending across into a scribe grid region of the semiconductor substrate. Another dielectric layer is formed overlying the first dielectric layer. An opening is formed through the first and second dielectric layers. The second dielectric layer is used as a mask for forming a doped region on the semiconductor substrate through the opening. A metal is formed that electrically contacts the doped region and an exterior edge of the first dielectric layer within the opening.
申请公布号 US8304326(B2) 申请公布日期 2012.11.06
申请号 US20090499241 申请日期 2009.07.08
申请人 GRIVNA GORDON M.;TU SHANGHUI L.;SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC 发明人 GRIVNA GORDON M.;TU SHANGHUI L.
分类号 H01L21/00 主分类号 H01L21/00
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