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经营范围
发明名称
Homogenizer Transforming Into Surface Light Source For Exposure Equipment
摘要
申请公布号
KR101198544(B1)
申请公布日期
2012.11.06
申请号
KR20100107441
申请日期
2010.11.01
申请人
发明人
分类号
H01L21/027;G03F7/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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