| 摘要 |
An elliptical vibration is generated by combining a longitudinal primary resonance vibration of the vibrator resulting from an expansion and a contraction of the vibrator in a direction of the central axis and a torsional resonance vibration resulting from twisting of the vibrator around the central axis as a torsional axis. The dimension ratio of the rectangle of the vibrator is chosen such that a resonance frequency of the longitudinal primary resonance vibration resulting from the expansion and the contraction of the vibrator in the direction of the central axis and a resonance frequency of the torsional resonance vibrations resulting from twisting of the vibrator around the central axis as the torsional axis match. The ultrasonic motor further includes a vibration detecting electrode layer. |
