摘要 |
By introducing a gas containing a reducing organic gas into the discharge space, the protective layer is exposed to the reducing organic gas. Then, the reducing organic gas is exhausted from the discharge space. Then, a discharge gas is enclosed to the discharge space. The protective layer includes a nano particle layer formed by nano crystal particles of metal oxides containing at least a first metal oxide and a second metal oxide. Moreover, the nano particle layer has at least one peak in an X-ray diffraction analysis. The peak is located between a first peak in the X-ray diffraction analysis of the first metal oxide and a second peak in the X-ray diffraction analysis of the second metal oxide. The first peak and the second peal have the same plane orientation as the plane orientation indicated by the peak.
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