| 摘要 |
PURPOSE: A wafer UV irradiation device is provided to improve productivity and work efficiency by controlling a wafer installing unit of a top transfer unit using a rotating device. CONSTITUTION: A UV irradiation device body(10) includes an upper part and a lower part. A bottom transfer unit is movably installed in the lower part of the UV irradiation device body. A top transfer unit(50) is movably installed in the upper part of the UV irradiation device body. A UV lamp emits ultraviolet rays to a wafer loaded on the top transfer unit and the bottom transfer unit. A rotating device rotates a wafer installing unit(51).
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