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发明名称
SEMICONDUCTOR LAYER
摘要
申请公布号
KR101197416(B1)
申请公布日期
2012.11.05
申请号
KR20117030584
申请日期
2004.08.04
申请人
发明人
分类号
C30B29/38;H01L21/20;C23C16/34;C30B25/02;C30B25/20;H01L21/205;H01L29/201;H01L33/32
主分类号
C30B29/38
代理机构
代理人
主权项
地址
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