发明名称 A COMBINED WATERJET GLIDING ARC PLASMA SCRUBBER SYSTEM
摘要 <p>PURPOSE: An integrated water-jet gliding arc plasma scrubber system is provided to decompose and remove perfluoro carbon and to inject gas and water of jet phase into the receiving space of water-jet gliding arc plasma. CONSTITUTION: An integrated water-jet gliding arc plasma scrubber system(10) receives gas containing perfluoro carbon and decomposes the perfluoro carbon with water-jet gliding arc plasma(20). Gas and wastewater from the water-jet gliding arc plasma is exhausted to the outside through a calcium hydroxide-based device(30). The wastewater from the water-jet arc plasma is transferred to the calcium hydroxide-based device through an electrocoagulation unit(40). Electrodes for the electrocoagulation unit are an aluminum electrode. The water-jet arc gliding arc plasma includes a reactor, a water-jet supplying unit, a gas supplying unit, and a plasma electrode. The inlet and the outlet of the reactor are formed at the upper part and the lower part of the reactor. A receiving space is formed in the reactor. A middle outlet is formed between the inlet and the outlet of the reactor. The water-jet supplying unit and the gas supplying unit are mounted on the upper part of the reactor. The plasma electrode is mounted at the receiving space formed on the upper part of the middle outlet. [Reference numerals] (30) Calcium hydroxide-based unit; (40) Electrocoagulation unit; (50) Circulating pump; (AA) Industrial manufacturing process; (BB) Gas+water; (CC,FF,HH,JJ,KK,) Wastewater; (DD) Purified exhaust gas and treated water; (EE,II) G(gas)</p>
申请公布号 KR20120121044(A) 申请公布日期 2012.11.05
申请号 KR20110038774 申请日期 2011.04.26
申请人 发明人
分类号 B01D53/32;B01D53/70;H01L21/02 主分类号 B01D53/32
代理机构 代理人
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