| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a plasmon conversion element having a fine metal scattering body composed of curved faces as much as possible. <P>SOLUTION: After a clad layer is formed on a substrate, an electrode pad for plating and a columnar structure are formed from a metal film and the columnar structure except for the top end is covered with a resist. The substrate is immersed in an electrolytic solution; and the electrode pad for plating is energized to subject the top end of the columnar structure to electrolytic plating to form a hemispheric dome structure on the top end of the columnar structure. Then a core and an overclad are formed; the substrate is diced to cut off the electrode pad for plating and the columnar structure; and the diced face is polished. <P>COPYRIGHT: (C)2013,JPO&INPIT |
