发明名称 |
Micromechanical Rotary Acceleration Sensor and Method for Detecting a Rotary Acceleration |
摘要 |
The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.
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申请公布号 |
US2012272735(A1) |
申请公布日期 |
2012.11.01 |
申请号 |
US201213453425 |
申请日期 |
2012.04.23 |
申请人 |
NEUL REINHARD;OHMS TORSTEN;HATTASS MIRKO;MEISEL DANIEL CHRISTOPH;ROBERT BOSCH GMBH |
发明人 |
NEUL REINHARD;OHMS TORSTEN;HATTASS MIRKO;MEISEL DANIEL CHRISTOPH |
分类号 |
G01P15/00 |
主分类号 |
G01P15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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