LASER PROCESSING APPARATUS AND METHOD

摘要

Provided are a laser processing apparatus and method capable of preventing conversion efficiency deterioration caused by integration of a tandem thin-film silicon solar cell. The laser processing apparatus of the present invention performs a dividing process by casting a laser beam (602) generated by a laser source and a control system (601) onto thin films stacked on a substrate (609) so as to form a scribe ditch (610) and thus to divide thin films. The apparatus comprises a beam shape controlling optical system (603) so that a cross section of the laser beam (602) cast onto the thin films can have a portion protruding forward in the direction of the dividing process.