Strained thin body CMOS with Si:C and SiGe stressor

摘要

A method is disclosed which is characterized as being process integration of raised source/drain and strained body for ultra thin planar and FinFET CMOS devices. NFET and PFET devices have their source/drain raised by selective epitaxy with in-situ p-type doped SiGe for the PFET device, and in-situ n-type doped Si:C for the NFET device. Such raised source/drains offer low parasitic resistance and they impart a strain onto the device bodies of the correct sign for respective carrier, electron or hole, mobility enhancement.