发明名称 |
IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN |
摘要 |
The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk that acts as one of the electrode faces forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector, such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector for detecting secondary electrons that are kept closer to the axis. A light guide may be used to offer electrical insulation between the photon detector and the scintillator.
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申请公布号 |
US2012273677(A1) |
申请公布日期 |
2012.11.01 |
申请号 |
US201213456944 |
申请日期 |
2012.04.26 |
申请人 |
TUMA LUBOMIR;HLAVENKA PETR;SYTAR PETR;CESKA RADEK;SED'A BOHUSLAV;FEI COMPANY |
发明人 |
TUMA LUBOMIR;HLAVENKA PETR;SYTAR PETR;CESKA RADEK;SED'A BOHUSLAV |
分类号 |
H01J37/26;H01J37/10;H01J37/244 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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