发明名称 DMOS TRANSISTOR WITH CAVITY BELOW DRIFT REGION
摘要 <p>A lateral DMOS transistor (300) formed on a silicon-on-insulator (SOI) structure (102) has a higher breakdown voltage that results from a cavity (310) that is formed in the bulk region (104) of the SOI structure. The cavity exposes a portion of the bottom surface of the insulator layer (106) of the SOI structure that lies directly vertically below the drift region of the DMOS transistor.</p>
申请公布号 WO2012149184(A2) 申请公布日期 2012.11.01
申请号 WO2012US35249 申请日期 2012.04.26
申请人 TEXAS INSTRUMENTS INCORPORATED;TEXAS INSTRUMENTS JAPAN LIMITED;FRENCH, WILLIAM;VASHCHENKO, VLADISLAV;FOOTE, RICHARD, WENDELL;SADOVNIKOV, ALEXEI;BHOLA, PUNIT;HOPPER, PETER, J. 发明人 FRENCH, WILLIAM;VASHCHENKO, VLADISLAV;FOOTE, RICHARD, WENDELL;SADOVNIKOV, ALEXEI;BHOLA, PUNIT;HOPPER, PETER, J.
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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