| 摘要 |
<p>A sample holding apparatus (80) for an electron microscope according to the present invention comprises: a sample holding assembly (10) formed by assembling three components, an upper diaphragm holding section (20), a sample holding plate (30), and a lower diaphragm holding section (40); and a holding section (80A) that holds the sample holding assembly in an exchangeable manner. The sample holding assembly comprises a cell (15) formed between a diaphragm (25) of the upper diaphragm holding section and a diaphragm (45) of the lower diaphragm holding section, and a flow path (49a) connected to the cell, and is configured such that a sample (61) mounted on a protrusion section (31) of the sample holding plate is arranged within the cell. The diaphragm of the upper diaphragm holding section, the sample, and the diaphragm of the lower diaphragm holding section are arranged along an optical axis (11) of an electron beam. In such a way, it has become possible to provide a sample holding apparatus for an electron microscope wherein observations of particular portions can be executed easily, and the diaphragms need not be exchanged for each of the observations, upon executing microscope observations in special atmospheres such as gas or liquid.</p> |
