| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a composite piezoelectric substrate, capable of forming an ultra-thin piezoelectric film having a uniform thickness by efficiently using a piezoelectric material. <P>SOLUTION: Ions are implanted from a surface 2a of a piezoelectric substrate 2 to form a defective layer 4 in a region at a predetermined depth from the surface 2a within the piezoelectric substrate 2. A supporting substrate 10 is bonded to the surface 2a of the piezoelectric substrate 2 to form a bonded substrate body 40. The bonded substrate body 40 is separated at the defective layer 4 formed in the piezoelectric substrate 2 so that a separation layer 3 between the surface 2a of the piezoelectric substrate 2 and the defective layer 4 is separated from the piezoelectric substrate 2 and bonded to the supporting substrate 10 to form a composite piezoelectric substrate 30, and a surface 3a of the separation layer 3 of the composite piezoelectric substrate 30 is smoothed. After ion implantation, polarization treatment of the separation layer 3 of the composite piezoelectric substrate 30 is performed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
