| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently and stably perform the regeneration process of the development waste liquid that includes a resist exfoliation object and tetraalkylammonium hydroxide (TAAH). <P>SOLUTION: When the development waste liquid including a resist exfoliation object and TAAH is adjusted to pH 8-12, then is subjected to a membrane separation process by an MF membrane module 4, and a retentate is subjected to a circulation process; the retentate is added with an inorganic flocculant and/or a polymer flocculant, is subjected to a flocculation/solid-liquid separation process, and is subjected to a membrane separation process sending back a separated water to the upstream of the MF membrane module 4. When the development waste liquid is subjected to a membrane separation, not a membrane supply water but the retentate obtained by the membrane separation treatment is added with a flocculant to be subjected to the flocculation/solid-liquid separation process, an obtained separated water is sent back to the upstream of the membrane, and is subjected to the membrane separation with the development waste liquid, thereby the flocculant consumption is reduced, and the equipment for the flocculation/solid-liquid separation is miniaturized, the suspended matter load of the membrane is reduced, and a stable and efficient treatment can be performed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
