| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize a laser illumination device capable of suppressing variation in intensity distribution within a plane perpendicular to a laser traveling direction and illuminating an object surface evenly and sufficiently brightly. <P>SOLUTION: The laser illumination device has: at least one light diffusion means 3 which is installed on a light path of laser 6 from a laser light source and capable of varying the light diffusion state; and at least one light expansion suppressing means 100. The light diffusion means 3 is means for randomly diffusing or scattering light, and the light expansion suppressing means 100 is means for recovering only the linearity of laser light whose light flux diameter is expanded and phase is disturbed to lose the linearity of the entire light by being diffused or scattered, while the phase is left disturbed. The laser illumination device allows the laser light 6 from the laser light source to pass through the light diffusion means 3, be emitted as light 6-2 which is diffused from the light expansion suppressing means but not expanded, to generate light for irradiating an object. <P>COPYRIGHT: (C)2013,JPO&INPIT |
