| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pure water supply system in which the amount of pure water to be supplied can be measured accurately by an inexpensive constitution. <P>SOLUTION: The pure water supply system 1 includes: a storage tank 10 for storing pure water; a circulation path 12 through which the pure water stored in the storage tank 10 is supplied to the outside of the storage tank 10 and the supplied pure water is returned to the storage tank 10; and a pump 11 for supplying the pure water from the storage tank 10 to the circulation path 12. A supply pipeline 13, which extends vertically downward and supplies the pure water flowing through the circulation path 12 to a reaction vessel 3, is connected to the middle part of the circulation path 12. A main pipe part 12e1, which horizontally extends from the middle part to a predetermined range on an upstream side, is arranged on the circulation path 12. A flowmeter 8, for measuring the flow rate of the pure water to be supplied to the reaction vessel 3, is disposed in the main pipe part 12e1. A first on-off valve 14a for opening/closing the circulation path 12 is disposed on the downstream side of the middle part of the circulation path 12 and a second on-off valve 14b for opening/closing the supply pipeline 13 is disposed on the supply pipeline 13. <P>COPYRIGHT: (C)2013,JPO&INPIT |
