发明名称 THIN FILM PATTERNING METHOD
摘要 Provided is a thin film patterning method for patterning a thin film made of one of inorganic, organic, and organic/inorganic materials provided on a first substrate including: forming and patterning a thin film made of a material A on the first substrate; forming a thin film made of a material B, which is one of inorganic, organic, and organic/inorganic materials, on the first substrate and on the thin film; bonding the thin film, which is formed on the thin film, to a second substrate, thereby laminating the first substrate and the second substrate together to produce a laminated substrate; and removing the thin film and the thin film, which is provided on the thin film, from the first substrate.
申请公布号 US2012273457(A1) 申请公布日期 2012.11.01
申请号 US201213448642 申请日期 2012.04.17
申请人 KIDO SHIGERU;SATO NOBUHIKO;HIROKI TOMOYUKI;OOKUBO KENJI;IZUMI NOZOMU;CANON KABUSHIKI KAISHA 发明人 KIDO SHIGERU;SATO NOBUHIKO;HIROKI TOMOYUKI;OOKUBO KENJI;IZUMI NOZOMU
分类号 B32B38/10;B44C1/22 主分类号 B32B38/10
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