ULTRAVIOLET LIGHT GENERATING TARGET, ELECTRON-BEAM-EXCITED ULTRAVIOLET LIGHT SOURCE, AND METHOD FOR PRODUCING ULTRAVIOLET LIGHT GENERATING TARGET

摘要

An ultraviolet light generating target (20) is provided with: a substrate (21) comprising sapphire, quartz, or rock crystal; and a light-emitting layer (22) that is provided on the substrate (21) and that generates ultraviolet light by receiving an electron beam. The light-emitting layer (22) contains powdered or particulate Pr:LuAG crystals. By means of using such a light-emitting layer (22) in a target, it is possible to significantly increase the ultraviolet light generation efficiency compared to when using a Pr:LuAG monocrystalline film.