| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress insulation breakdown of a target supply device supplying a charged target of a target material. <P>SOLUTION: The target supply device may include: a target storage part storing a target material inside; a target output part in which a through hole for outputting the target material stored in the target storage part is formed; an electrode which is arranged to face the target output part and in which a through hole where the target material passes is formed, while an electrical insulating material is coated on a part of a surface facing the target output part; and a voltage generator applying a voltage between the target material and the electrode. <P>COPYRIGHT: (C)2013,JPO&INPIT |
