摘要 |
<p>The invention relates to a spatial filter measuring arrangement (1) and a spatial filter measuring device (2) comprising at least one sensor (4, 5; 41I-41IV; 51) and a spatial filter, wherein electromagnetic radiation, in particular light, that is emitted or reflected by a measurement object (13), is imaged onto the sensor (4, 5; 41I-41IV; 51, 52) by means of the spatial filter. The invention further relates to a method for spatial filter measurement. The spatial filter measuring arrangement according to the invention is further developed in that the spatial filter is designed as a micro-mirror array which has mirror elements (21-21′″) which can be moved about respective angular positions.</p> |