| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation device which can enhance the adsorption performance of a getter in an excimer lamp, which is internally provided with a fluorescent substance or a reflection film, even in a state where the excimer lamp is cooled. <P>SOLUTION: The light irradiation device comprises a long excimer lamp where a pair of electrodes are arranged on the external surface of a discharge vessel having the internal surface provided with a fluorescent substance, an outer tube composed of a light permeable material and provided so that the excimer lamp is inserted therein, and a cooler which supplies cooling air from one end of the excimer lamp toward the other end thereof. The excimer lamp is provided with a getter at the other end thereof in the discharge vessel. <P>COPYRIGHT: (C)2013,JPO&INPIT |
