| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an objective which can increase the NA of the objective. <P>SOLUTION: A focusing lens element and each field lens element are formed of the same single glass material. All constituents of a Mangin mirror assembly 312, a field lens element assembly 305 and a focusing lens element assembly 311 are arranged along the axis of received light energy. In the Mangin mirror assembly, two reflective surfaces of one or more Mangin mirror elements are mirror surfaces at a non-zero distance along the axis of received light energy. <P>COPYRIGHT: (C)2013,JPO&INPIT |
