| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hard membrane which is excellent in friction resistance, hardly causes seizure or the like, and is excellent in slide performance even if used for a long period of time, and a forming method of the hard membrane which can form the hard membrane excellent in the slide performance in a short time. <P>SOLUTION: The hard membrane expressed by a chemical formula M<SB POS="POST">x</SB>B<SB POS="POST">a</SB>C<SB POS="POST">b</SB>N<SB POS="POST">c</SB>is characterized in that M is at least one metal element selected from elements of a group 4A, a group 5A and a group 6A, and Si, Al, and expressions of 0≤a≤0.2, 0≤c≤0.2, 0<x-a-c, x-a-c<b≤0.9, 0.05≤x<0.5 and x+a+b+c=1 are satisfied. <P>COPYRIGHT: (C)2013,JPO&INPIT |
