SEMICONDUCTOR DEVICE AND METHOD OF PROGRAMMING THE SAME
摘要
<p>A semiconductor device and a method of programming the same are provided. The semiconductor device comprises a semiconductor substrate, which has interconnection lines formed therein; through-silicon vias (TSVs), which penetrate the semiconductor substrate; and also comprises a programmable device to switch between ON state and OFF state, by which the TSVs are connected to the interconnection lines. The present invention is advantageous for improving the flexibility of the TSV in practical applications.</p>
申请公布号
WO2012145977(A1)
申请公布日期
2012.11.01
申请号
WO2011CN78327
申请日期
2011.08.12
申请人
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES;ZHONG, HUICAI;LIANG, QINGQING;ZHAO, CHAO;ZHU, HUILONG