| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the durability and stabilize the output characteristics of a vibration sensor for a musical instrument. <P>SOLUTION: A vibration sensor for a musical instrument includes a substrate, a first electrode film that is formed on the substrate and connected thereto, a piezoelectric film that is formed on the first electrode film and connected thereto, a second electrode film that is formed on the piezoelectric film and connected thereto, an insulating film that is formed on the second electrode film and connected thereto, and a shield film that is formed on the insulating film and connected to the insulating film and the first electrode film, the shield film being made of a conductive material and insulated from the second electrode film by the insulating film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
