Piezoelectric resonator with two layers

摘要

A piezoelectric resonator device comprises five layers. A first layer and a fifth layer include one or more metal electrodes. A second layer and a fourth layer comprise a piezoelectric material. A third layer comprises a metal layer. In a first area of the first layer the first layer metal electrodes include a first layer periodic structure along one dimension comprising one of the one or more first layer metal electrodes and a space with no first layer metal electrodes. In a second area of the fifth layer the fifth layer metal electrodes include a fifth layer periodic structure along the one dimension comprising one of the one or more fifth layer metal electrodes and a space with no fifth layer metal electrodes. The first layer periodic structure and the fifth layer periodic structure are aligned so that the one of the one or more fifth layer metal electrodes are centered under the space with no first layer metal electrodes and the one of the one or more first layer metal electrodes are centered over the space with no fifth layer metal electrodes or are aligned so that the one of the one or more fifth layer metal electrodes are centered under the first layer metal electrodes.